New atmospheric analyser

30 July 2001

MKS Instruments have released their latest atmospheric analysis system, the Mini-Lab, for use with applications such as catalytic monitoring, thermal analysis and process gas analysis.

The Mini-Lab incorporates a high precision triple filter quadrupole mass spectrometer and can analyse process gases at atmospheric pressure down to sub ppb levels – with long term stability. Further applications also inclde the monitoring of water vapour, hydrocarbons and other organic impurities in process gas feeds.

Data is acquired using Spectra’s Process Eye 2000 software package. This is a recipe-driven platform which allows critical parameters of the process to be monitored over days, weeks or months. In addition, the software has the capability to monitor other critical process parameters including total pressure, temperature and gas flow.

The Mini-Lab is a fully self-contained ‘bench-top’ system with automatic start-up and shut down routines. Additional features include automated calibration as well as operation from a remote network PC. Connection to the process chamber is via a heated silica capillary which provdes a fast response to changes in the gas mixture with minimal memory effects.



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